Calculation of the optical constants of a thin layer upon a transparent substrate from the reflection spectrum

Published under licence by IOP Publishing Ltd
, , Citation D A Minkov 1989 J. Phys. D: Appl. Phys. 22 1157 DOI 10.1088/0022-3727/22/8/021

0022-3727/22/8/1157

Abstract

A method has been proposed for calculation of the optical constants of a thin layer upon a transparent substrate only from the reflection spectrum into the region of transmission of the layer. The envelopes of the maxima of the spectrum RM and of the minima Rm are used, taking into account the finite dimensions of the substrate. The algorithm of the calculations is similar to the one proposed by Swanepoel (1983) using the transmission spectrum. The method makes it possible to calculate the thickness of the layer and the refractive index n with an error of 0.2%. The correct description of the dispersive relationship of n is obtained for an amorphous layer Ge19As21S60.

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