Carrier mobility model for simulation of SiC-based electronic devices

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Published 9 August 2002 Published under licence by IOP Publishing Ltd
, , Citation T T Mnatsakanov et al 2002 Semicond. Sci. Technol. 17 974 DOI 10.1088/0268-1242/17/9/313

0268-1242/17/9/974

Abstract

Simple analytical approximations are proposed for describing the temperature and concentration dependences of low-field mobility in the main polytypes of silicon carbide (SiC): 6H, 4H and 3C in wide ranges of temperature and concentration. The obtained results can be directly used for the computer simulation of SiC-based devices. Different approaches to the analytical approximation of SiC parameters are critically correlated and analysed.

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10.1088/0268-1242/17/9/313