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Self-patterning of arrays of ferroelectric capacitors: description by theory of substrate mediated strain interactions

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Published 24 October 2003 IOP Publishing Ltd
, , Citation M Dawber et al 2003 J. Phys.: Condens. Matter 15 L667 DOI 10.1088/0953-8984/15/44/L03

0953-8984/15/44/L667

Abstract

Self-patterning presents an appealing alternative to lithography for the production of arrays of nanoscale ferroelectric capacitors for use in high density non-volatile memory devices. However current levels of registration achieved experimentally are far from adequate for this application. To provide a guide for experiment we have applied the theories developed for self-patterning of semiconductor nanocrystals to two self-patterning systems of potential interest for ferroelectric memory applications, metallic bismuth oxide on bismuth titanate and ferroelectric lead zirconate titanate on strontium titanate.

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10.1088/0953-8984/15/44/L03