Abstract
Electrothermal actuators have a very promising future in MEMS applications since they can generate large deflection and force with low actuating voltages and small device areas. In this study, a lumped model of a two-hot-arm horizontal thermal actuator is presented. In order to prove the accuracy of the lumped model, finite element analysis (FEA) and experimental results are provided. The two-hot-arm thermal actuator has been fabricated using the MUMPs process. Both the experimental and FEA results are in good agreement with the results of lumped modeling.
Export citation and abstract BibTeX RIS