The development of a LIGA-microfabricated gripper for micromanipulation tasks

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Published under licence by IOP Publishing Ltd
, , Citation M C Carrozza et al 1998 J. Micromech. Microeng. 8 141 DOI 10.1088/0960-1317/8/2/024

0960-1317/8/2/141

Abstract

The manipulation of mechanical and biological microobjects is important for many applications in basic research and, possibly, for industrial processes. The end-effector is the key component for obtaining safe and effective micromanipulation. Among the different technologies which can be used for fabricating the end-effector, we intend to exploit LIGA. The design of the LIGA-fabricated microgripper is described in detail; the performance of two test microgrippers (fabricated by standard mechanical machining) are described and critically analysed.

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10.1088/0960-1317/8/2/024