Abstract
Describes the application of silicon to sensors in which strain is detected. The physical properties that make silicon so useful for these applications and the technology specific to the fabrication of sensors are discussed.
Silicon in mechanical sensors
J C Greenwood1
Published under licence by IOP Publishing Ltd
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Citation J C Greenwood 1988 J. Phys. E: Sci. Instrum. 21 1114
DOI 10.1088/0022-3735/21/12/001
This article is corrected by 1989 J. Phys. E: Sci. Instrum. 22 191
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