Spray pyrolysis deposition of thin films

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Published under licence by IOP Publishing Ltd
, , Citation S López et al 1996 Semicond. Sci. Technol. 11 433 DOI 10.1088/0268-1242/11/3/025

0268-1242/11/3/433

Abstract

Ternary compound thin films have been prepared on Pyrex glass substrates by the spray pyrolysis process using tin chloride and n, n-dimethylthiourea as starting materials. The depositions were carried out at a substrate temperature of . The identification of the phase was achieved by means of x-ray diffraction measurements. The optical reflectance and transmittance of the prepared films were used to obtain the variation of the refractive index and the extinction coefficient as a function of the wavelength. These calculated values were used to find the absorption coefficient and the optical bandgap and gave . From measurements of the conductance as a function of , a dark activation energy was determined with a value of 1.02 eV.

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10.1088/0268-1242/11/3/025