Abstract
Oxidation of pure titanium was carried out at room temperature under different oxygen pressures (10-8-10-6 torr). The kinetics for each pressure was determined. Measured film thicknesses were larger for higher pressures. Deconvolution of XPS spectra showed than TiO was the major oxide present and TiO2 the minor component. Formation of Ti2O3 and Ti3O5 was also observed.
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