Micro-to-macro fluidic interconnectors with an integrated polymer sealant

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Published 9 August 2001 Published under licence by IOP Publishing Ltd
, , Citation Jr-Hung Tsai and Liwei Lin 2001 J. Micromech. Microeng. 11 577 DOI 10.1088/0960-1317/11/5/321

0960-1317/11/5/577

Abstract

This paper presents the design, fabrication and testing results of inserting a polymer sealant (Mylar) into a micro-to-macro fluidic interconnection. Two processes, discrete and integrated Mylar sealant, have been developed by means of post-fabrication after the mircofluidic components such as micro-channels and micro-chambers are constructed. The integrated process utilizes microfabrication techniques such that batch processing is feasible and the sealant dimensions can be precisely controlled. The discrete process takes advantage of easy and simple processing and is compatible with most microfluidic systems without any extra wafer-level micromachining process. In both processes, macroscale capillary tubes with a diameter of 320 µm have been successfully connected to microscale channels with the help of the Mylar. Both leakage and pull-out tests are conducted and successfully demonstrate the functionality of the interconnectors. The leakage test shows that no leakage is observed up to 190 kPa and the pull-out test proves 100% survival rate under a pulling force of 2 N.

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10.1088/0960-1317/11/5/321