Microactuators fabricated by the LIGA process

Using the LIGA process combined with a sacrificial layer technique, microstructures with great structural heights and lateral dimensions in the micrometer range have been fabricated. These structures are used as microactuators. By using electrostatic linear actuators large displacements are achieved. A large torque is realized by a micromotor with a toothed rotor, friction being diminished by a rolling movement. Bimaterial elements based on PMMA and metal are designed to achieve a movement parallel to the substrate, to fabricate, for example, a gripper. Electromagnetic activation has been used to measure the fatigue behavior of LIGA micromechanical elements.