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Hyperelastic pressure sensing with a liquid-embedded elastomer

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Published 29 November 2010 2010 IOP Publishing Ltd
, , Citation Yong-Lae Park et al 2010 J. Micromech. Microeng. 20 125029 DOI 10.1088/0960-1317/20/12/125029

0960-1317/20/12/125029

Abstract

A hyperelastic pressure transducer is fabricated by embedding silicone rubber with microchannels of conductive liquid eutectic gallium–indium. Pressing the surface of the elastomer with pressures in the range of 0–100 kPa will deform the cross-section of underlying channels and change their electric resistance by as much as 50%. Microchannels with dimensions as small as 25 µm are obtained with a maskless, soft lithography process that utilizes direct laser exposure. Change in electrical resistance is measured as a function of the magnitude and area of the surface pressure as well as the cross-sectional geometry, depth and relative lateral position of the embedded channel. These experimentally measured values closely match closed-form theoretical predictions derived from plane strain elasticity and contact mechanics.

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