Analysis of tip deflection and force of a bimetallic cantilever microactuator

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Published under licence by IOP Publishing Ltd
, , Citation Wen-Hwa Chu et al 1993 J. Micromech. Microeng. 3 4 DOI 10.1088/0960-1317/3/1/002

0960-1317/3/1/4

Abstract

The authors present a model of the electromechanical performance of bimetallic cantilever microactuators by deriving the relationship between the tip deflection and change in temperature using a simple analytical approach. The model is verified by comparison with finite element analysis and published experimental data. The maximum tip force generated by a bimetallic cantilever beam is calculated by finding the reaction force needed at the tip to prevent cantilever beam deflection.

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