Abstract
A direct finite-element model is developed for the full-scale analysis of the electromechanical phenomena involved in surface acoustic wave (SAW) devices. The equations of wave propagation in piezoelectric materials are discretized using the Galerkin method, in which an implicit algorithm of the Newmark family with unconditional stability is implemented. The Rayleigh damping coefficients are included in the elements near the boundary to reduce the influence of the reflection of waves. The performance of the model is demonstrated by the analysis of the frequency response of a Y-Z lithium niobate filter with two uniform ports, with emphasis on the influence of the number of electrodes. The frequency response of the filter is obtained through the Fourier transform of the impulse response, which is solved directly from the finite-element simulation. It shows that the finite-element results are in good agreement with the characteristic frequency response of the filter predicted by the simple phase-matching argument. The ability of the method to evaluate the influence of the bulk waves at the high-frequency end of the filter passband and the influence of the number of electrodes on insertion loss is noteworthy. We conclude that the direct finite-element analysis of SAW devices can be used as an effective tool for the design of high-performance SAW devices. Some practical computational challenges of finite-element modeling of SAW devices are discussed.