Detection of inactive defects in crystalline silicon by high-resolution transmission-electron energy-loss spectroscopy

H. Kohno, T. Mabuchi, S. Takeda, M. Kohyama, M. Terauchi, and M. Tanaka
Phys. Rev. B 58, 10338 – Published 15 October 1998
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Abstract

We have applied high-resolution transmission electron energy-loss spectroscopy to explore the electronic structure of a reconstructed defect in the interior of Si crystal. Despite the electronic and optical inactivity of the defects, the L2,3 near-edge structure becomes sharp within the narrow energy range (less than 1 eV) whenever an electron probe locates on the defects. Our analysis based on ab initio computations has suggested that the sharpened near edge arises from the odd-membered atomic ring in the defects.

  • Received 23 March 1998

DOI:https://doi.org/10.1103/PhysRevB.58.10338

©1998 American Physical Society

Authors & Affiliations

H. Kohno, T. Mabuchi, and S. Takeda

  • Department of Physics, Graduate School of Science, Osaka University, 1-16 Machikaneyama, Toyonaka, Osaka 560-0043, Japan

M. Kohyama

  • Department of Material Physics, Osaka National Research Institute, 1-8-31 Midorigaoka, Ikeda, Osaka 564-1155, Japan

M. Terauchi and M. Tanaka

  • Research Institute for Scientific Measurements, Tohoku University, 2-1-1 Katahira Aoba-ku, Sendai 980-8577, Japan

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Issue

Vol. 58, Iss. 16 — 15 October 1998

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