Nucleation of hydrogen-induced platelets in silicon

N. H. Nickel, G. B. Anderson, N. M. Johnson, and J. Walker
Phys. Rev. B 62, 8012 – Published 15 September 2000
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Abstract

Hydrogen-induced platelet generation in single-crystal silicon was investigated as a function of the Fermi energy. Platelet formation is observed only for Fermi-level positions of ECEF<~0.3eV. With decreasing ECEF the platelet density increases monotonically to 2.45×1017cm3. Experiments performed on electrically compensated silicon demonstrate that the formation of hydrogen-induced platelets is solely controlled by the Fermi energy.

  • Received 15 May 2000

DOI:https://doi.org/10.1103/PhysRevB.62.8012

©2000 American Physical Society

Authors & Affiliations

N. H. Nickel

  • Hahn-Meitner-Institut Berlin, Kekuléstrasse 5, 12489 Berlin, Germany

G. B. Anderson, N. M. Johnson, and J. Walker

  • Xerox Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, California 94304

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Vol. 62, Iss. 12 — 15 September 2000

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