For a resonator in an electrostatic microelectromechanical system (MEMS), nonlinear coupling between applied electrostatic force and the mechanical motion of the resonator can lead to chaotic oscillations. Better performance of the device can be achieved when the oscillations are periodic with large amplitude. We investigate the nonlinear dynamics of a system of deformable doubly clamped beam, which is the core in many MEMS resonators, and propose a control strategy to convert chaos into periodic motions with enhanced output energy. Our study suggests that chaos control can lead to energy enhancement and consequently high performance of MEM devices.

• Received 20 April 2007

DOI:https://doi.org/10.1103/PhysRevE.77.026210