The atomic structure of precipitates embedded in crystalline membranes was observed for the first time by high-angle annular dark field scanning transmission electron microscopy (HAADF-STEM) with an electron probe in an atomic dimension. The experimental image was analyzed by taking a line profile and was compared with the calculated intensities obtained from the multislice based HAADF-STEM simulation. A model shifting Xe atoms slightly from the on-site of the Al matrix in the [100] direction agreed well with the experimental profile and image. From these results, the small displacement of Xe atoms to the Al matrix is estimated at about 0.5 Å.

• Received 9 November 1998

DOI:https://doi.org/10.1103/PhysRevLett.82.3082