Laser-annealed thin-film fiber-optic temperature sensor

Glenn Beheim; Jorge L. Sotomayor; Meg L. Tuma; Massood Tabib-Azar

doi:10.1117/12.167561

1 February 1994 Laser-annealed thin-film fiber-optic temperature sensor

Glenn Beheim, Jorge L. Sotomayor, Meg L. Tuma, Massood Tabib-Azar

Proceedings Volume 2045, Laser-Assisted Fabrication of Thin Films and Microstructures; (1994) https://doi.org/10.1117/12.167561
Event: Optics Quebec, 1993, Quebec City, Canada

Abstract

A fiber-optic temperature sensor has been fabricated by sputtering a silicon film, together with some protective overlayers, directly onto the end of an optical fiber. The approximately one- micrometers thick silicon film serves as a Fabry-Perot etalon whose resonant wavelengths vary as functions of temperature due to changes in the film's refractive index. To manufacture a sensor with adequate long-term stability, the initially amorphous silicon film must be annealed. Laser annealing has been found to be a promising means to stabilize the silicon film's structure without degrading the optical fiber's protective buffer coating.

Citation Download Citation

Glenn Beheim, Jorge L. Sotomayor, Meg L. Tuma, and Massood Tabib-Azar "Laser-annealed thin-film fiber-optic temperature sensor", Proc. SPIE 2045, Laser-Assisted Fabrication of Thin Films and Microstructures, (1 February 1994); https://doi.org/10.1117/12.167561

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