Factors affecting silicon membrane burst strength

Albert K. Henning; Sapna Patel; Michael Selser; Bradford A. Cozad

doi:10.1117/12.524648

23 December 2003 Factors affecting silicon membrane burst strength

Albert K. Henning, Sapna Patel, Michael Selser, Bradford A. Cozad

Proceedings Volume 5343, Reliability, Testing, and Characterization of MEMS/MOEMS III; (2003) https://doi.org/10.1117/12.524648
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States

Abstract

Factors affecting the fracture strength of single-crystal silicon membranes are assessed. These factors include: membrane shape at the membrane’s intersection with structural frames or sidewalls, membrane thickness, membrane surface roughness, membrane mis-orientation to the principal crystallographic axes, wafer starting material quality, membrane stress (or pre-tension), and microstructure and shape at bond interfaces, such as the anodic bond interface between membrane and Pyrex wafers. Measurements of fracture strength versus these factors are made. Direct measurements of stress are also made using micro-Raman techniques. Simulations of membrane structures are studied, in order to evaluate the measurements. The results indicate that the predominant factor affecting fracture strength is surface roughness.

Citation Download Citation

Albert K. Henning, Sapna Patel, Michael Selser, and Bradford A. Cozad "Factors affecting silicon membrane burst strength", Proc. SPIE 5343, Reliability, Testing, and Characterization of MEMS/MOEMS III, (23 December 2003); https://doi.org/10.1117/12.524648

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available