Modeling and optimization of the hot embossing process for micro- and nanocomponent fabrication

M. Worgull; Mathias P. Heckele; J. F. Hétu; K. K. Kabanemi

doi:10.1117/1.2176729

1 January 2006 Modeling and optimization of the hot embossing process for micro- and nanocomponent fabrication

M. Worgull, Mathias P. Heckele, J. F. Hétu, K. K. Kabanemi

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 5, Issue 1, 011005 (January 2006). https://doi.org/10.1117/1.2176729

Abstract

Hot embossing and injection molding belong to the established plastic molding processes in microengineering. Based on experimental findings, a variety of microstructures have been replicated using these processes. However, with increasing requirements regarding the embossing surface, and the simultaneous decrease of the structure size down into the nanorange, increasing know-how is needed to adapt hot embossing to industrial standards. To reach this objective, a German-Canadian cooperation project has been launched to study hot embossing theoretically by process simulation and experimentally. The present publication reports on the proceeding and present first results.

©(2006) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

M. Worgull, Mathias P. Heckele, J. F. Hétu, and K. K. Kabanemi "Modeling and optimization of the hot embossing process for micro- and nanocomponent fabrication," Journal of Micro/Nanolithography, MEMS, and MOEMS 5(1), 011005 (1 January 2006). https://doi.org/10.1117/1.2176729

Published: 1 January 2006

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available