Ellipsometric tomography

Vladmir A. Kotenev

doi:10.1117/12.131899

3 November 1992 Ellipsometric tomography

Vladmir A. Kotenev

Proceedings Volume 1843, Analytical Methods for Optical Tomography; (1992) https://doi.org/10.1117/12.131899
Event: Analytical Methods for Optical Tomography, 1991, Zvenigorod, Russian Federation

Abstract

The method of ellipsometric tomography designed for precision measurements of complex refractive index variations in the volume of thin surface layers is considered. It is shown, that multi-wavelength ellipsometric measurements of light, reflected and scattered by the surface layer, allowed us to reconstruct its internal structure by solving a first order integral equation.

Citation Download Citation

Vladmir A. Kotenev "Ellipsometric tomography", Proc. SPIE 1843, Analytical Methods for Optical Tomography, (3 November 1992); https://doi.org/10.1117/12.131899

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