Paper
6 March 2014 High speed surface functionalization using direct laser interference patterning, towards 1 m2/min fabrication speed with sub-μm resolution
Andrés Lasagni, Teja Roch, Matthias Bieda, Dimitri Benke, Eckhard Beyer
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Abstract
Periodic patterned surfaces can be used to provide unique surface properties in applications, such as biomaterials, surface engineering, photonics and sensor systems. Such periodic patterns can be produced using laser processing tools, showing significant advantages due to a precise modification of the surfaces without contamination, remote and contactless operation, flexibility, and precise energy deposition. On the other hand, the resolution of such laser based surface structuring methods, like direct laser writing, is generally inversely proportional to the fabrication speed. Therefore, the development of new laser structuring technologies as well as strategies offering both high speed and resolution is necessary. In this study, the fabrication of spatially ordered structures with micrometer and submicrometer lengthscales at high surface processing fabrication speed is demonstrated. The procedures shown here are applied to process both planar surfaces and also three dimensional components. Different application examples of structured surfaces on different materials are also described. The applications include the development of thin film structured electrodes to improve the efficiency of organic light emitting diodes (OLEDs) as well as the direct fabrication of decorative elements on technological steels. Finally, an example of fabrication at high fabrication speed is shown.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Andrés Lasagni, Teja Roch, Matthias Bieda, Dimitri Benke, and Eckhard Beyer "High speed surface functionalization using direct laser interference patterning, towards 1 m2/min fabrication speed with sub-μm resolution", Proc. SPIE 8968, Laser-based Micro- and Nanoprocessing VIII, 89680A (6 March 2014); https://doi.org/10.1117/12.2041215
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CITATIONS
Cited by 12 scholarly publications and 1 patent.
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KEYWORDS
Optical lithography

Beam splitters

Head

Organic light emitting diodes

Electrodes

Laser systems engineering

Thin films

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