Paper
1 November 1991 Development of optical waveguides by sol-gel techniques for laser patterning
Helmut K. Schmidt, Herbert Krug, Reiner Kasemann, Frank Tiefensee
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Abstract
ORMOCER's with high optical performance and chemical stability are synthesized via the sol-gel process. Methacrylate group substituated silanes are copolymerized with methacrylic acid which acts as a chemical link between Zr as second inorganic network former. Chemical stable complex formation is proved by IR analysis and 13c NMR investigations. This material is laser patternable by the addition of a suitable photoinitiator and is characterized by high dielectric strength and low optical loss for applications in optics and non-linear optics.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Helmut K. Schmidt, Herbert Krug, Reiner Kasemann, and Frank Tiefensee "Development of optical waveguides by sol-gel techniques for laser patterning", Proc. SPIE 1590, Submolecular Glass Chemistry and Physics, (1 November 1991); https://doi.org/10.1117/12.50199
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Cited by 41 scholarly publications.
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KEYWORDS
Waveguides

Zirconium

Glasses

Optical coatings

Optical lithography

Chemistry

Sol-gels

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