Designing nanostructures by glancing angle deposition

Yiping Zhao; Dexian Ye; Gwo-Ching Wang; Toh-Ming Lu

doi:10.1117/12.505253

27 October 2003 Designing nanostructures by glancing angle deposition

Yiping Zhao, Dexian Ye, Gwo-Ching Wang, Toh-Ming Lu

Proceedings Volume 5219, Nanotubes and Nanowires; (2003) https://doi.org/10.1117/12.505253
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

Three-dimensional nanostructures can be fabricated by the glancing angle deposition technique. By rotating the substrate in both polar and azimuthal directions, one can fabricate desired nanostructures, such as nano-rod arrays with different shapes, nano-spring arrays, and even multilayer nanostructures. This method offers a fully three-dimensional control of the nanostructure with additional capability of self-alignment. There is almost no limitation on materials that can be fabricated into desired nanostructures. In this presentation, we will discuss the current status of the glancing angle deposition technology, its potential applications, and its future challenges.

Citation Download Citation

Yiping Zhao, Dexian Ye, Gwo-Ching Wang, and Toh-Ming Lu "Designing nanostructures by glancing angle deposition", Proc. SPIE 5219, Nanotubes and Nanowires, (27 October 2003); https://doi.org/10.1117/12.505253

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