An image sensor of 1 Mfps with photon counting sensitivity

Takeharu Goji Etoh; Hideki Mutoh

doi:10.1117/12.566170

17 March 2005 An image sensor of 1 Mfps with photon counting sensitivity

Takeharu Goji Etoh, Hideki Mutoh

Proceedings Volume 5580, 26th International Congress on High-Speed Photography and Photonics; (2005) https://doi.org/10.1117/12.566170
Event: 26th International Congress on High-Speed Photography and Photonics, 2004, Alexandria, Virginia, United States

Abstract

For application of a video camera of 1,000,000 fps, developed by the authors in 2001, to electron microscopes and biological microscopes, a next generation ultra-high-speed image sensor with photon-counting sensitivity is proposed. It is based on three key technologies, i.e., (1) ISIS, the In-situ Storage Image Sensor for ultra-high-speed continuous image capturing, invented by the authors, (2) CCM, the Charge Carrier Multiplication by impact ionization, invented by Hynecek, and (3) conventional back-side illuminated CCD. It works not only for ultra-high-speed and ultra-high-sensitive image capturing, but also for image capturing under illumination of ultra-violet, visible, and near-infrared lights, soft X-ray and electron beam. The sensor is named the PC-ISIS, the photon-counting ISIS. The concept of the PC-ISIS is presented. Difficulties in the realization of the PC-ISIS are discussed.

Citation Download Citation

Takeharu Goji Etoh and Hideki Mutoh "An image sensor of 1 Mfps with photon counting sensitivity", Proc. SPIE 5580, 26th International Congress on High-Speed Photography and Photonics, (17 March 2005); https://doi.org/10.1117/12.566170

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