Abstract
The possibility of obtaining a Si-SiO2 nanocomposite layer by oxidation of porous silicon is demonstrated. The nanocomposite thus prepared consists of silicon oxide with inclusions of crystalline silicon in the form of rounded particles 5 to 30 nm in diameter and a filamentary cellular structure with filaments a few nanometers thick. The I-V characteristics of these structures were measured under different sample excitation conditions (photo-and thermal stimulation). The trap concentration and effective carrier mobility are estimated. Carriers are found to be captured intensely by traps created in the large-area interface in the composite structure.
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Translated from Fizika Tverdogo Tela, Vol. 47, No. 7, 2005, pp. 1316–1322.
Original Russian Text Copyright © 2005 by Sorokin, Grigor’ev, Kalmykov, Sokolov.
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Sorokin, L.M., Grigor’ev, L.V., Kalmykov, A.E. et al. Structural properties and current transport in a nanocomposite formed on a silicon surface by oxidation of the porous layer. Phys. Solid State 47, 1365–1371 (2005). https://doi.org/10.1134/1.1992619
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DOI: https://doi.org/10.1134/1.1992619