Abstract
Scientific and methodical fundamentals are developed for the technology of manufacturing of microstructured Si anodes based on macroporous silicon. The main technological processes include the electrochemical etching of single-crystal silicon wafers that allows obtaining an ordered lattice of cylindrical macropores with a cavity between the porous layer and support, anisotropic shaping, formation of a copper contact, and separation of the silicon structure from the support. Microstructures are manufactured in the form of a grid, columns, and zigzags with thin monodispersed walls of different crystallographic orientation. The possibility of repeated use of the Si support for anodic treatment and the manufacturing of several anodic structures from a single plate Si wafer is shown. The performed electrochemical tests demonstrate that the anodes manufactured according to the developed technology sustain hundreds of charge–discharge cycles.
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Original Russian Text © G.V. Li, E.V. Astrova, A.M. Rumyantsev, V.B. Voronkov, A.V. Parfen’eva, V.A. Tolmachev, T.L. Kulova, A.M. Skundin, 2015, published in Elektrokhimiya, 2015, Vol. 51, No. 10, pp. 1020–1029.
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Li, G.V., Astrova, E.V., Rumyantsev, A.M. et al. Microstructured silicon anodes for lithium-ion batteries. Russ J Electrochem 51, 899–907 (2015). https://doi.org/10.1134/S1023193515100080
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DOI: https://doi.org/10.1134/S1023193515100080