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Formation of aluminum island films under electron irradiation of a sapphire surface

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Abstract

The present paper is devoted to experimental investigation of electron-stimulated desorption from a single-crystal sapphire surface. Using Auger electron spectroscopy metallization of the sapphire surface, the character of which is dependent on the electron beam parameters, is observed under low-energy electron bombardment,. Using atomic-force microscopy, images of metal island films with a diameter of 50–100 nm are obtained.

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Correspondence to E. Yu. Zykova.

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Original Russian Text © E.Yu. Zykova, A.A. Khaidarov, I.P. Ivanenko, I.K. Gainullin, 2012, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2012, No. 11, pp. 7–11.

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Zykova, E.Y., Khaidarov, A.A., Ivanenko, I.P. et al. Formation of aluminum island films under electron irradiation of a sapphire surface. J. Surf. Investig. 6, 877–881 (2012). https://doi.org/10.1134/S102745101211016X

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  • DOI: https://doi.org/10.1134/S102745101211016X

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