Abstract
The space-time dynamics of thermal melting, subsurface cavitation, spallative ablation, and fragmentation ablation of the silicon surface excited by single IR femtosecond laser pulses is studied by timeresolved optical reflection microscopy. This dynamics is revealed by monitoring picosecond and (sub)nanosecond oscillations of probe pulse reflection, which is modulated by picosecond acoustic reverberations in the dynamically growing surface melt subjected to ablation and having another acoustic impedance, and by optical interference between the probe pulse replicas reflected by the spalled layer surface and the layer retained on the target surface. The acoustic reverberation periods change during the growth and ablation of the surface melt film, which makes it possible to quantitatively estimate the contributions of these processes to the thermal dynamics of the material surface. The results on the thermal dynamics of laser excitation are supported by dynamic measurements of the ablation parameters using noncontact ultrasonic diagnostics, scanning electron microscopy, atomic force microscopy, and optical interference microscopy of the modified regions appearing on the silicon surface after ablation.
Similar content being viewed by others
References
D. Bäuerle, Laser Processing and Chemistry (Springer-Verlag, Berlin, 2000).
M. Ishino, A. Ya. Faenov, M. Tanaka, N. Hasegawa, M. Nishikino, S. Tamotsu, T. A. Pikuz, N. A. Inogamov, V. V. Zhakhovsky, I. Yu. Skobelev, V. E. Fortov, V. A. Khohlov, V. V. Shepelev, T. Ohba, T. Kaihori, Y. Ochi, T. Imazono, and T. Kawachi, J. Appl. Phys. 109, 013504 (2011).
A. A. Ionin, S. I. Kudryashov, A. E. Ligachev, S. V. Makarov, L. V. Seleznev, and D. V. Sinitsyn, JETP Lett. 94(4), 266 (2011).
C. V. Shank, R. Yen, and C. Hirlimann, Phys. Rev. Lett. 50, 454 (1983).
M. C. Downer, R. L. Fork, and C. V. Shank, J. Opt. Soc. Am. B 2, 595 (1985).
P. Saeta, J.-K. Wang, Y. Siegal, N. Bloembergen, and E. Mazur, Phys. Rev. Lett. 67, 1023 (1991).
K. Sokolowski-Tinten, H. Schulz, J. Bialkowski, and D. von der Linde, Appl. Phys. A: Solids Surf. 53, 227 (1991).
J. Bonse, Appl. Phys. A: Mater. Sci. Process. 84, 63 (2006).
X. Y. Wang and M. C. Downer, Opt. Lett. 17, 1450 (1992).
K. Sokolowski-Tinten, S. I. Kudryashov, V. Temnov, J. Bialkowski, D. von der Linde, A. Cavalleri, H. O. Jeschke, M. E. Garcia, and K. H. Bennemann, Springer Ser. Chem. Phys. 66, 425 (2000).
T. Y. Choi and C. P. Grigoropoulos, J. Appl. Phys. 92, 4818 (2002).
J. Bonse, G. Bachelier, J. Siegel, J. Solis, and H. Sturm, J. Appl. Phys. 103, 054910 (2008).
N. A. Inogamov, V. V. Zhakhovskii, S. I. Ashitkov, Yu. V. Petrov, M. B. Agranat, S. I. Anisimov, K. Nishihara, and V. E. Fortov, JETP 107(1), 1 (2008).
K. Sokolowski-Tinten, J. Bialkowski, A. Cavalleri, M. Boing, H. Schueler, and D. von der Linde, Proc. SPIE-Int. Soc. Opt. Eng. 3343, 46 (1998).
S. I. Ashitkov, M. B. Agranat, G. I. Kanel’, P. S. Komarov, and V. E. Fortov, JETP Lett. 92(8), 516 (2010).
N. A. Inogamov, V. V. Zhakhovsky, S. I. Ashitkov, V. A. Khokhlov, V. V. Shepelev, P. S. Komarov, A. V. Ovchinnikov, D. S. Sitnikov, Yu. V. Petrov, M. B. Agranat, S. I. Anisimov, and V. E. Fortov, Contrib. Plasma Phys. 51, 367 (2011).
X. Zeng, X. L. Mao, R. Greif, and R. E. Russo, Appl. Phys. A: Mater. Sci. Process. 80, 237 (2005).
T. Y. Choi, D. J. Hwang, and C. P. Grigoropoulos, Appl. Surf. Sci. 197, 720 (2002).
I. Mingareev and A. Horn, Appl. Phys. A: Mater. Sci. Process. 92, 917 (2008).
N. Zhang, X. Zhu, J. Yang, X. Wang, and M. Wang, Phys. Rev. Lett. 99, 167602 (2007).
R. K. Raman, Y. Murooka, C. Ruan, T. Yang, S. Berber, and D. Tománek, Phys. Rev. Lett. 101, 077401 (2008).
Y. Miyamoto, H. Zhang, and D. Tomanek, Phys. Rev. Lett. 104, 208302 (2010).
R. Nüske, C. von Korff Schmising, A. Jurgilaitis, H. Enquist, H. Navirian, P. Sondhauss, and J. Larsson, Rev. Sci. Instrum. 81, 013106 (2010).
G. Sciani and R. J. D. Miller, Rep. Prog. Phys. 74, 096101 (2011).
A. M. Lindenberg, S. Engemann, K. J. Gaffney, K. Sokolowski-Tinten, J. Larsson, P. B. Hillyard, D.A. Reis, D. M. Fritz, J. Arthur, R. A. Akre, M. J. George, A. Deb, P. H. Bucksbaum, J. Hajdu, D. A. Meyer, M. Nicoul, C. Blome, Th. Tschentscher, A. L. Cavalieri, R. W. Falcone, S. H. Lee, R. Pahl, J. Rudati, P. H. Fuoss, A. J. Nelson, P. Krejcik, D. P. Siddons, P. Lorazo, and J. B. Hastings, Phys. Rev. Lett. 100, 135502 (2008).
F. Carbone, P. Baum, P. Rudolf, and A. H. Zewail, Phys. Rev. Lett. 100, 035501 (2008); F. Dorchies, A. Levy, C. Coyon, P. Combis, D. Descamps, C. Fourment, M. Harmand, S. Hulin, P. M. Leguay, S. Petit, O. Peyrusse, and J. J. Santos, Phys. Rev. Lett. 107, 245006 (2011).
P. G. Debenedetti, Metastable Liquids: Concepts and Principles (Princeton University Press, Princeton, 1996).
L. Zhigilei, Z. Lin, and D. S. Ivanov, J. Phys. Chem. C 113, 11892 (2009).
E. Leveugle, D. S. Ivanov, and L. V. Zhigilei, Appl. Phys. A: Mater. Sci. Process. 79, 1643 (2004).
P. Lorazo, L. J. Lewis, and M. Meunier, Phys. Rev. B: Condens. Matter 73, 134108 (2006).
A. K. Upadhyay, N. A. Inogamov, B. Rethfeld, and H. M. Urbassek, Phys. Rev. B: Condens. Matter 78, 045437 (2008).
K. Sokolowski-Tinten, C. Blome, C. Dietrich, A. Tarasevitch, M. Horn von Hoegen, D. von der Linde, A. Cavalleri, J. Squier, and M. Kammler, Phys. Rev. Lett. 87, 225701 (2001).
H. Enquist, H. Navirian, T. N. Hansen, A. M. Lindenberg, P. Sondhauss, O. Synnergren, J. S. Wark, and J. Larsson, Phys. Rev. Lett. 98, 225502 (2007); M. Nicoul, V. Shymanovich, A. Tarasevich, D. von der Linde, and K. Sokolowski-Tinten, Appl. Phys. Lett. 98, 191902 (2011).
A. Couairon and A. Mysyrowicz, Phys. Rep. 441, 47 (2007).
A. A. Ionin, S. I. Kudryashov, L. V. Seleznev, and D. V. Sinitsyn, JETP Lett. 90(3), 181 (2009).
D. von der Linde, K. Sokolowski-Tinten, and J. Bialkowski, Appl. Surf. Sci. 109–110, 1 (1997).
S. I. Kudryashov and V. I. Emel’yanov, JETP 94(1), 94 (2002).
Handbook of Optical Constants of Solids, Ed. by E. D. Palik (Academic, Orlando, Florida, United States, 1998).
A. A. Ionin, S. I. Kudryashov, S. V. Makarov, L. V. Seleznev, and D. V. Sinitsyn, JETP Lett. 94(1), 34 (2011).
I. S. Grigoriev and E. Z. Meilikhov, Handbook of Physical Quantities (Energoatomizdat, Moscow, 1991; CRC Press, Boca Raton, Florida, United States, 1997).
K. M. Shvarev, B. A. Baum, and N. V. Gel’d, Sov. Phys. Solid State 16(11), 2111 (1974).
H. W. K. Tom, G. D. Aumiller, and C. H. Brito-Cruz, Phys. Rev. Lett. 60, 1438 (1988); K. Sokolowski-Tinten, J. Bialkowski, and D. von der Linde, Phys. Rev. B: Condens. Matter 51, 14186 (1995).
B. C. Gundrum, R. S. Averback, and D. G. Cahill, Appl. Phys. Lett. 91, 011906 (2007).
S. L. Johnson, P. A. Heimann, A. M. Lindenberg, H. O. Jeschke, M. E. Garcia, Z. Chang, R. W. Lee, J. J. Rehr, and R. W. Falcone, Phys. Rev. Lett. 91, 157403 (2003).
M. C. Downer and C. V. Shank, Phys. Rev. Lett. 56, 761 (1986); A. Cavalleri, K. Sokolowski-Tinten, J. Bialkowski, M. Schreiner, and D. von der Linde, J. Appl. Phys. 85, 3301 (1999).
P. Yu. M. Cardona, Fundamentals of Semiconductors: Physics and Materials Properties (Springer-Verlag, Berlin, 1996; Fizmatlit, Moscow, 2002).
E. Yu. Tonkov, Phase Transformations of Elements under High Pressure (Metallurgiya, Moscow, 1988; CRC Press, Boca Raton, Florida, United States, 2004).
N. M. Keita and S. Steinemann, Phys. Lett. A 72, 153 (1979).
V. E. Gusev and A. A. Karabutov, Laser Optoacoustics (Nauka, Moscow, 1991; American Institute of Physics, New York, 1993).
P. H. Bucksbaum and J. Bokor, Phys. Rev. Lett. 53, 182 (1984); K. Sokolowski-Tinten, J. Bialkowski, M. Boing, A. Cavalleri, and D. von der Linde, Phys. Rev. B: Condens. Matter 58, R11805 (1998); W.-L. Chan, R. S. Averback, D. G. Cahill, and A. Lagoutchev, Phys. Rev. B: Condens. Matter 78, 214107 (2008).
D. J. Hwang, C. P. Grigoropoulos, and T. Y. Choi, J. Appl. Phys. 99, 083101 (2006).
S. Lee, D. Yang, and S. Nikumb, Appl. Surf. Sci. 254, 2996 (2008).
D. H. Reitze, T. R. Zhang, Wm. M. Wood, and M. C. Downer, J. Opt. Soc. Am. B 7(1), 84 (1990).
K. Sokolowski-Tinten and D. von der Linde, Phys. Rev. B: Condens. Matter 61, 2648 (2000); M. B. Agranat, S. I. Anisimov, S. I. Ashitkov, A. V. Ovchinnikov, P. S. Kondratenko, D. S. Sitnikov, and V. E. Fortov, JETP Lett. 83 (11), 501 (2006).
V. V. Temnov, K. Sokolowski-Tinten, P. Zhou, and Dietrich von der Linde, J. Opt. Soc. Am. B 23, 1954 (2006).
V. V. Zhakhovskii, N. A. Inogamov, and K. Nishihara, JETP Lett. 87(8), 423 (2008).
O. S. Heavens, Optical Properties of Thin Solid Films (Butterworth, London, 1955).
B. Rethfeld, K. Sokolowski-Tinten, V. V. Temnov, S. I. Kudryashov, J. Bialkowski, A. Cavalleri, and D. von der Linde, Proc. SPIE-Int. Soc. Opt. Eng. 4423, 186 (2001).
D. Batani, H. Stabile, A. Ravasio, G. Lucchini, F. Strati, T. Desai, J. Ullschmied, E. Krousky, J. Skala, L. Juha, B. Kralikova, M. Pfeifer, Ch. Kadlec, T. Mocek, A. Präg, H. Nishimura, and Y. Ochi, Phys. Rev. E: Stat., Nonlinear, Soft Matter Phys. 68, 067403 (2003).
S. I. Kudryashov, A. A. Ionin, S. V. Makarov, N. N. Mel’nik, L. V. Seleznev, and D. V. Sinitsyn, AIP Conf. Proc. 1464, 244 (2012).
S. I. Kudryashov, Proc. SPIE-Int. Soc. Opt. Eng. 5448, 1171 (2004).
S. I. Kudryashov, M. Kandyla, C. Roeser, and E. Mazur, Phys. Rev. B: Condens. Matter 75, 085207 (2007).
R. Taft and J. Stareck, J. Phys. Chem. 34, 2307 (1930).
D. S. Ivanov and L. V. Zhigilei, Phys. Rev. Lett. 98, 195701 (2007).
B. Rethfeld, K. Sokolowski-Tinten, D. von der Linde, and S. I. Anisimov, Phys. Rev. B: Condens. Matter 65, 092103 (2002); X.-M. Bai and M. Li, Phys. Rev. B: Condens. Matter 77, 134109 (2008); G. Rastelli and E. Capelluti, Phys. Rev. B: Condens. Matter 84, 184305 (2011).
S. I. Ashitkov, N. A. Inogamov, V. V. Zhakhovskii, Yu. N. Emirov, M. B. Agranat, I. I. Oleinik, S. I. Anisimov, and V. E. Fortov, JETP Lett. 95(4), 176 (2012).
K. Sokolowski-Tinten, J. Bialkowski, A. Cavalleri, D. von der Linde, A. Oparin, J. Meyer-ter-Vehn, and S. I. Anisimov, Phys. Rev. Lett. 81, 224 (1998).
S. I. Kudryashov, Candidate’s Dissertation in Mathematical Physics (Moscow State University, Moscow, 1999).
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © A.A. Ionin, S.I. Kudryashov, L.V. Seleznev, D.V. Sinitsyn, A.F. Bunkin, V.N. Lednev, S.M. Pershin, 2013, published in Zhurnal Eksperimental’noi i Teoreticheskoi Fiziki, 2013, Vol. 143, No. 3, pp. 403–422.
Rights and permissions
About this article
Cite this article
Ionin, A.A., Kudryashov, S.I., Seleznev, L.V. et al. Thermal melting and ablation of silicon by femtosecond laser radiation. J. Exp. Theor. Phys. 116, 347–362 (2013). https://doi.org/10.1134/S106377611302012X
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S106377611302012X