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Microwave plasma deposition and mechanical treatment of single crystals and polycrystalline diamond films

  • Plasma Chemical Methods of Production and Treatment of Materials
  • Published:
Inorganic Materials: Applied Research Aims and scope

Abstract

The effect of mechanical polishing on the surface topography of mono-and polycrystalline diamond films produced by microwave plasma deposition and synthetic diamond crystals is investigated. The values of the temperature and friction coefficient of diamond films during polishing on the cast iron disk are measured. After finishing treatment, the surface roughness of a single crystal diamond is ∼0.5 nm and that of a polycrystal one is ∼8.1 nm. Because of the difference in wear rate of misoriented crystallites in the diamond film, nanosteps are formed on the grain boundaries.

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Authors and Affiliations

  1. Prokhorov General Physics Institute, Russian Academy of Sciences, ul. Vavilova 38, Moscow, 119991, Russia

    E. E. Ashkihazi, E. V. Zavedeev, A. P. Bolshakov, V. G. Ralchenko, S. G. Ryzhkov, A. V. Polsky, N. I. Kuznetsov & V. I. Konov

  2. Sevchenko Institute of Applied Physics Problems, Belarusian State University, ul. Kurchatova 7, Minsk, 220108, Belarus

    G. V. Sharonov

  3. Bakul Institute of Superhard Materials, National Academy of Sciences of Ukraine, ul. Avtozavodskaya 2, Kyiv, 04074, Ukraine

    V. N. Tkach

Authors
  1. E. E. Ashkihazi
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  2. E. V. Zavedeev
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  3. A. P. Bolshakov
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  4. V. G. Ralchenko
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  5. S. G. Ryzhkov
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  6. A. V. Polsky
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  7. N. I. Kuznetsov
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  8. G. V. Sharonov
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  9. V. N. Tkach
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  10. V. I. Konov
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Correspondence to E. E. Ashkihazi.

Additional information

Original Russian Text © E.E. Ashkihazi, E.V. Zavedeev, A.P. Bolshakov, V.G. Ralchenko, S.G. Ryzhkov, A.V. Polsky, N.I. Kuznetsov, G.V. Sharonov, V.N. Tkach, V.I. Konov, 2013, published in Fizika i Khimiya Obrabotki Materialov, 2013, No. 1, pp. 29–36.

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Ashkihazi, E.E., Zavedeev, E.V., Bolshakov, A.P. et al. Microwave plasma deposition and mechanical treatment of single crystals and polycrystalline diamond films. Inorg. Mater. Appl. Res. 5, 230–236 (2014). https://doi.org/10.1134/S2075113314030022

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  • DOI: https://doi.org/10.1134/S2075113314030022

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