Fabrication of Porous TiO2 Films Using Two-Step Replication of Microstructure of Anodic Alumina

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Copyright (c) 1992 The Japan Society of Applied Physics
, , Citation Hideki Masuda et al 1992 Jpn. J. Appl. Phys. 31 L1775 DOI 10.1143/JJAP.31.L1775

1347-4065/31/12B/L1775

Abstract

Microporous TiO2 films were fabricated using a two-step replicating process, in which porous anodic alumina was used as a template. The TiO2 films prepared from a TiO2 sol solution had straight micropores of high aspect ratio, and the distribution of the pore diameter was very sharp. Change due to postheating treatment of as-prepared TiO2 films was examined by electron diffraction analysis and scanning electron microscopic observation.

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