Characterization of MgxZn1-xO Films Grown by Remote-Plasma-Enhanced Metalorganic Chemical Vapor-Deposition using bis-Ethylcyclopentadienyl Magnesium

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Published 11 October 2005 • Copyright (c) 2005 The Japan Society of Applied Physics
, , Citation Atsushi Nakamura et al 2005 Jpn. J. Appl. Phys. 44 7267 DOI 10.1143/JJAP.44.7267

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This article is retracted by 2010 Jpn. J. Appl. Phys. 49 129201

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1 Graduate School of Electronic Science and Technology, Shizuoka University, 3-5-1 Johoku, Hamamatsu, Shizuoka 432-8011, Japan

2 Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Hamamatsu, Shizuoka 432-8011, Japan

Dates

  1. Received 9 February 2005
  2. Accepted 27 June 2005
  3. Published

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Abstract

MgxZn1-xO films were successfully grown on a-plane sapphire (11bar 20) substrates by remote-plasma-enhanced metalorganic chemical vapor-deposition (RPE-MOCVD) using diethyl zinc (DEZn) and bis-ethylcyclopentadienyl magnesium (EtCp2Mg). By increasing magnesium content in the films, the crystal structure was shifted through a mixed state from wurtzite to rock salt. The optical band-gap of the films at nearly 3.28 eV was shifted to 3.69 eV by alloying with magnesium depending on the alloy composition. Both optical absorption edges and emission peaks of MgxZn1-xO films shifted to higher energy when the magnesium content at room temperature was increased, showing alloy broadening. The Stokes' shift of wurtzite MgxZn1-xO alloy films was quantitatively evaluated. The results are relevant to exciton localization.

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We published the above paper in October, 2005.

The authors regret that during the publication of the above paper there were serious errors on the quantitative magnesium composition. These erroneous figures are no longer possible to correct an appropriate value, and these errors might lead to confuse readers. We would like to retract the above paper.

We have made the following mistakes: (1) A mistake in calculation of a vapor pressure of EtCp2Mg We have calculated the vapor pressure in ''°C'', however it must be read in ''K''. Thus, the relationship between the flow ratio (%) of [EtCp2Mg]/[EtCp2Mg + DEZn] and the magnesium content in the MgxZn1-xO films showed in Fig. 1 is no longer possible to correct. (2) Calculation errors in the units of Mg composition We calculated the magnesium content in wt %, though it should be calculated in mol %. We have compared the magnesium contents even the different unit of magnesium content with the references from different research groups. This error influences all statements in the figures and text. (3) Incorrect notation on the XRD patterns There are incorrect notations on the peak in Fig. 2. The notation of ZnO(0001), MgZnO(0001), MgZnO(004), and MgO(004) should be replaced to ZnO(0002), MgZnO(0002), MgZnO(002), and MgO(002), respectively. We reached the consensus that the above paper should be retracted.

We thank to Ms. Takako Tsuboi for pointing out our errors. We express our deep apology for any inconvenience brought to the readers and the editors.

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10.1143/JJAP.44.7267