Remarks on the Vacancy Mechanisms in Ion Implantation
Masahiro Kurata1, Yasumitsu Morikawa1, Koichi Nagami1 and Haruo Kuroda1
Copyright (c) 1973 The Japan Society of Applied Physics
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Citation Masahiro Kurata et al 1973 Jpn. J. Appl. Phys. 12 472
DOI 10.1143/JJAP.12.472
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