Fabrication and Characterization of GaAs Single Electron Devices Having Single and Multiple Dots Based on Schottky In-Plane-Gate and Wrap-Gate Control of Two-Dimensional Electron Gas

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Copyright (c) 1997 The Japan Society of Applied Physics
, , Citation Seiya Kasai et al 1997 Jpn. J. Appl. Phys. 36 1678 DOI 10.1143/JJAP.36.1678

1347-4065/36/3S/1678

Abstract

Single-dot and multiple (2, 3, 18, and 37)-dot single electron transistors (SETs) based on the control of a two-dimensional electron gas (2DEG) with a recently proposed Schottky in-plane gate (IPG) and a newly introduced Schottky wrap gate (WPG) were successfully fabricated on AlGaAs/GaAs wafers using electron beam (EB) lithography and their transport properties were investigated. Each of the fabricated SETs showed Coulomb blockade-like conductance oscillation. In single-dot SETs, a strong correlation was found between the device dimensions and the temperature limit of the conductance oscillation. Conductance oscillation characteristics of multiple-dot SETs were complicated, and were not explained by the classical Coulomb blockade theory. Based on a simplified theoretical analysis using computer simulation, it was shown that quantized energy due to electron confinement and dot-coupling can dominate the charging effect in the fabricated SETs.

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10.1143/JJAP.36.1678