Rate Equations for the Creation of Various Metastable Dangling Bonds in a-Si:H Mediated by Floating Bonds

and

Copyright (c) 1999 The Japan Society of Applied Physics
, , Citation Tatsuo Shimizu Tatsuo Shimizu and Minoru Kumeda Minoru Kumeda 1999 Jpn. J. Appl. Phys. 38 L911 DOI 10.1143/JJAP.38.L911

1347-4065/38/8B/L911

Abstract

Using rate equations based on the creation and annihilation of a pair of a dangling bond and a floating bond and their interconversion, various metastable defect-creation processes in a-Si:H are quantitatively analyzed for the case of bandgap-light irradiation, electron-beam irradiation and thermal quenching from elevated temperatures. It is found that the calculated results can reproduce most of the observed results.

Export citation and abstract BibTeX RIS

10.1143/JJAP.38.L911