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Silicon Nanoneedles Grown by a Simple Thermal Treatment Using Metal-Sulfur Catalysts

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Copyright (c) 2002 The Japan Society of Applied Physics
, , Citation Hideo Kohno and Seiji Takeda 2002 Jpn. J. Appl. Phys. 41 577 DOI 10.1143/JJAP.41.577

1347-4065/41/2R/577

Abstract

We found that dense silicon nanoneedles can be grown on silicon substrates epitaxially by heating with metal and sulfur via the vapor–liquid–solid process. Needles were examined by transmission electron microscopy and the growth direction was determined to be mostly <111 >. The results of our study revealed that sulfur can be used for fabricating self-organized silicon nanostructures.

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10.1143/JJAP.41.577