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The Influence of Various Upper Electrodes on Fatigue Properties of Perovskite Pb(Zr,Ti)O3 Thin Films

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Published 1 September 2003 • Copyright (c) 2003 The Japan Society of Applied Physics
, , Citation Yoichiro Masuda and Takashi Nozaka 2003 Jpn. J. Appl. Phys. 42 5941 DOI 10.1143/JJAP.42.5941

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1 Department of Electronic Intelligence Systems, Faculty of Engineering, Hachinohe Institute of Technology, 88-1, Ohbiraki, Myo, Hachinohe, Aomori 031-8501, Japan

Dates

  1. Received 12 May 2003
  2. Accepted 11 July 2003
  3. Published

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Abstract

Ferroelectric thin films of Pb(Zr,Ti)O3 (PZT) were prepared by chemical solution deposition (CSD). The top electrodes of platinum (Pt), SrRuO3 (SRO), and IrO2 thin films are deposited on the PZT thin films by RF magnetron sputtering (RF) and the pulsed laser deposition (PLD) methods, respectively. The polarization fatigue of ferroelectric thin-film capacitors is investigated. As a result, the remanent polarization value of the PZT thin films of SRO/PZT/PT/Pt/TiOx/SiO2/Si and IrO2/PZT/PT/Pt/TiOx/SiO2/Si remains more than 1011 switching cycles at constant value and the value of the PZT thin films of Pt/PZT/PT/Pt/TiOx/SiO2/Si decreases to approximately 50% of its initial value at 108 cycles. It is confirmed that polarization fatigue is improved using SRO and IrO2 thin-film electrodes as top electrodes.

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10.1143/JJAP.42.5941