Abstract
We demonstrated a densely integrated multiple-wavelength GaInAs/GaAs vertical-cavity surface-emitting laser (VCSEL) array using non planar metal-organic chemical vapor deposition (MOCVD). The fabricated 1-mm-long array consists of 20-channel VCSELs and the pitch between each channel is as small as 50 µm. The lasing wavelength of each channel was precisely designed based on the relationship between the lasing wavelength and the pattern width. The wavelength spacing is within 1 nm. All VCSELs exhibited single-mode operation, an output power of over 1.2 mW and a threshold current of 0.52±0.1 mA.