Post-treatment Method of Producing Ordered Array of Anodic Aluminum Oxide Using General Purity Commercial (99.7%) Aluminum

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Published 8 March 2005 Copyright (c) 2005 The Japan Society of Applied Physics
, , Citation Chien Chon Chen et al 2005 Jpn. J. Appl. Phys. 44 1529 DOI 10.1143/JJAP.44.1529

1347-4065/44/3R/1529

Abstract

A new and simplified method of fabricating anodic aluminum oxide has been developed. This new method uses anodization but follows a route different from the commonly known 1- or 2-step anodization. General-purity (99.7%) commercial aluminum is used instead of the high-purity aluminum required in conventional anodization. The disordered arrangements of pores that initially form on the surface of aluminum rearranged by self-diffusion inside the anodic aluminum oxide (AAO) layer via long-term heat treatment. The enlargement of the pores on AAO that crystallized to γ phase was achieved by pore widening. Uniformly distributed nanopores with a diameter of 75 nm and wall a thickness of 16 nm were formed on a 9 µm thick AAO film. These ordered nanochannels were obtained over an area of several square millimeters, with a density of 1.4×1010 pores per cm2.

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10.1143/JJAP.44.1529