Hard X-ray Photoelectron Emission Microscopy as Tool for Studying Buried Layers

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Published 8 March 2006 Copyright (c) 2006 The Japan Society of Applied Physics
, , Citation Takanori Wakita et al 2006 Jpn. J. Appl. Phys. 45 1886 DOI 10.1143/JJAP.45.1886

1347-4065/45/3R/1886

Abstract

We have performed photoelectron emission microscopy measurements with hard X-rays (HX-PEEM) and have shown that HX-PEEM has a spatial resolution higher than 106 nm for observing the sample surface and can detect signals from a Au layer buried under a 50-nm-thick Co layer. These results mean that HX-PEEM has a probing depth one order of magnitude deeper than that of PEEM with soft X-rays. This deeper probing depth with HX-PEEM provides a new opportunity to investigate electronic and/or magnetic structures of buried layers under a thick overlayer. The notable advantages and potential applications of HX-PEEM are discussed.

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