Abstract
Electrochemical properties of ruthenium oxide 
films with different degrees of crystallinity were studied. The 
films were grown by pulsed laser deposition at substrate temperatures from 30 to 400°C. At low temperatures, the amorphous phase of 
films was formed. At high temperatures, the crystalline phase of 
films was obtained. From the cyclic voltammetric study in 
solution, it was found that the current response for an electrode of the amorphous 
film was higher than that of the crystalline film. A proton diffusion length of larger than 5.8 nm was obtained on the 
film prepared at 30°C.