Scott D. Collins1
© 1997 ECS - The Electrochemical Society
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Citation Scott D. Collins 1997 J. Electrochem. Soc. 144 2242
DOI 10.1149/1.1837773
281 Total downloads
A presentation of etch stop engineering is presented with a review of the present state of the art in etch stop micro‐machining. This review assumes a global definition for an etch stop and focuses on salient examples of common etch stop techniques, as well as unique and/or novel etch stop methods. A table of representative etch stops is also presented as a summary.
