Homogeneous Gas Phase Nucleation of Silane in Low Pressure Chemical Vapor Deposition (LPCVD)

Journal of The Electrochemical Society

Z. M. Qian¹, H. Michiel¹, A. Van Ammel¹, J. Nijs¹ and R. Mertens¹

© 1988 ECS - The Electrochemical Society
Journal of The Electrochemical Society, Volume 135, Number 9 Citation Z. M. Qian et al 1988 J. Electrochem. Soc. 135 2378 DOI 10.1149/1.2096275

Download Article PDF

Article metrics

32 Total downloads

¹ Interuniversitair Micro‐Electronica Centrum, Kapeldreef, 75, B‐3030 Leuven, Belgium

Journal RSS

Abstract not Available.

Export citation and abstract BibTeX RIS

Previous article in issue

Next article in issue