Au Free Ohmic Contacts for High Temperature InAlN/GaN HEMT's

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© 2009 ECS - The Electrochemical Society
, , Citation Mohammed Alomari et al 2009 ECS Trans. 25 33 DOI 10.1149/1.3238203

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1 Institute of Electron Devices and Circuits (EBS)

2 École Polytechnique Fédérale de Lausanne

3 Alcatel-Thales III/V Lab

4 University of Ulm

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1938-5862/25/12/33

Abstract

In this paper we report on the fabrication of Au free ohmic contacts, with a contact resistance down to 0.46 Ωmm. The contact resistance and thermal stability was evaluated up to 1000oC in vacuum. No degradation of the ohmic contact was observed after cooling down to room temperature.

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