Synthesis of High Purity Silicon Nanoparticles in a Low Pressure Microwave Reactor
The formation of pure single crystalline silicon nanoparticles by microwave induced decomposition of silane in a low pressure flow reactor is reported. The morphology and crystal structure of the particles are characterized in situ by particle mass spectrometry (PMS) and ex situ by means of X-ray diffraction, high resolution transmission electron microscopy, electron energy loss spectroscopy, and infrared spectroscopy. The preparation method allows for the adjustment of the mean particle diameter in the range 6 nm ≤ dPM ≤ 11 nm by controlling the precursor concentration, gas pressure, and microwave power. Spectroscopic investigations reveal that the particles are single crystal silicon. The potential on n- or p-type doping is in progress.
Keywords: EELS; FTIR; HRTEM; LOW-PRESSURE FLAME; MICROWAVE PLASMA; NANOPARTICLES; SILICON; XRD
Document Type: Review Article
Publication date: 01 November 2004
- Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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