Fabrication of Micro-Structured Surfaces on Bulk Metallic Glasses Based on Fast Tool Servo Assisted Diamond Turning

The development of efficient processing technology for fabrications of bulk metallic glasses (BMGs) with microstructured surfaces is one of the key issues for the popularization of BMGs in micro/nano electromechanical systems. For the first time the possibility of fabricating complicated micro-structures on BMGs by fast tool servo (FTS) assisted diamond turning is reported in this paper. The working principle of the proposed micromachining technology is detailed. Primary experiments are conducted to fabricate a typical sinusoidal grid surface on a Zr_41.2Ti_13.8Cu_12.5Ni₁₀Be_22.5 BMG to verify the feasibility of the proposed processing technology. The characteristics of the machined surface and the chip are investegated. The obtained results demonstrate that the proposed diamond turning technology is very promising for the fabrication of micro-structured surfaces on BMGs.