1997 Volume 40 Issue 2 Pages 253-259
The combined 3-point method, which combines the generalized 3-point method with the sequential 3-point method, is described in the present paper. The combined 3-point method can not only measure profiles that include high-frequency components whose spatial wavelengths are shorter than the probe distance, but also cancel the influence of the z-directional error and the pitching error in the scanning motion. In the combined 3-point method, some data points from a profile evaluated by the generalized 3-point method are chosen as reference points of the standard area and are used to determine the relative heights among the data groups of the sequential 3-point method. An automatic selection method was used to select the standard area correctly and quickly. Theoretical analyses and computer simulations were performed to confirm the effectiveness of the combined 3-point method. Experimental profile measurements were also carried out using three capacitance-type displacement probes.
JSME international journal. Ser. 1, Solid mechanics, strength of materials
JSME international journal. Ser. A, Mechanics and material engineering
JSME international journal. Ser. 3, Vibration, control engineering, engineering for industry
JSME international journal. Ser. C, Dynamics, control, robotics, design and manufacturing
JSME International Journal Series A Solid Mechanics and Material Engineering
JSME International Journal Series B Fluids and Thermal Engineering