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Laser photosublimation of compound semiconductors

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Abstract

The visible-laser sublimation of CdTe, HgCdTe, CdS, and GaAs has been studied. A dynamic light guiding has been identified with an active feedback mechanism and is connected to the observation of 0.4 μm wide single-mode guiding structures during deep etching. The incipient stages of sublimation have been studied by mass spectrometry and are discussed in relation to diffusion mechanisms in the solid state.

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Authors and Affiliations

  1. Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, Massachusetts, 02173, USA

    M. Rothschild, C. Arnone & D. J. Ehrlich

Authors
  1. M. Rothschild
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  2. C. Arnone
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  3. D. J. Ehrlich
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Additional information

On leave from Dipartimento di Ingegneria Elettrica, Universita di Palermo and IAIF-CNR, Viale delle Seienze, 90128 Palermo, Italy.

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Rothschild, M., Arnone, C. & Ehrlich, D.J. Laser photosublimation of compound semiconductors. Journal of Materials Research 2, 244–251 (1987). https://doi.org/10.1557/JMR.1987.0244

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  • DOI: https://doi.org/10.1557/JMR.1987.0244

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