Crystallinity of rf-sputtered MoS₂ films

Abstract

The crystallinity and morphology of thin, radio-frequency (rf) -sputtered MoS₂ films deposited on 440C stainless steel substrates at both ambient (∼70°C) and high temperatures (245°C) were studied by scanning electron microscopy (SEM) and by x-ray diffraction (Read thin-film photography and 0−20 scans). Under SEM the films exhibited a “ridgelike” (or platelike) formation region for thicknesses between 0.18 and 1.0 μm MoS₂. X-ray diffraction was shown to give more detailed and accurate information than electron defraction, previously used for elucidating the structure of sputtered lubricant films. Read thin-film x-ray diffraction photographs revealed patterns consistent with the presence of polycrystalline films and strong orientation of the MoS₂ crystallites. Correlation of those patterns with 0−20 scans of the films indicated that the basal planes of the MoS₂ crystallites [i.e., the (001) planes] were perpendicular to the substrate surface plane, and that various edge planes [i.e., the (h k 0) planes] in the individual crystallites were parallel to the surface plane, in agreement with previous observations of thinner films. Sliding wear caused the crystallites to orient with their basal planes parallel to the surface plane. The crystallite lattices in all films in this study were shown to exhibit compressive stress (∼ 3%–5% with respect to natural molybdenite) in the direction perpendicular to the (h k 0) planes, and the worn films were expanded (i.e., exhibited tensile stress) perpendicular to the (001) plane. In addition, the shapes of the x-ray diffraction peaks were strongly influenced by the presence of oxygen impurities and/or sulfur vacancies in the MoS₂ lattice, indicating that x-ray diffraction may provide a simple quality-control test for the production of a film with optimum lubricating properties.