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Analysis of the accuracy of the bulge test in determining the mechanical properties of thin films

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Abstract

Since its first application to thin films in the 1950’s the bulge test has become a standard technique for measuring thin film mechanical properties. While the apparatus required for the test is simple, interpretation of the data is not. Failure to recognize this fact has led to inconsistencies in the reported values of properties obtained using the bulge test. For this reason we have used the finite element method to model the deformation behavior of a thin film in a bulge test for a variety of initial conditions and material properties. In this paper we will review several of the existing models for describing the deformation behavior of a circular thin film in a bulge test, and then analyze these models in light of the finite element results. The product of this work is a set of equations and procedures for analyzing bulge test data that will improve the accuracy and reliability of this technique.

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Authors and Affiliations

  1. Department of Materials Science and Engineering, Stanford University, 94305, Stanford, California, USA

    Martha K. Small & W. D. Nix

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  1. Martha K. Small
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  2. W. D. Nix
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Small, M.K., Nix, W.D. Analysis of the accuracy of the bulge test in determining the mechanical properties of thin films. Journal of Materials Research 7, 1553–1563 (1992). https://doi.org/10.1557/JMR.1992.1553

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  • DOI: https://doi.org/10.1557/JMR.1992.1553

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